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Plasma Ashing Equipment Product List

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Yamato Material Co., Ltd. Business Introduction

A business that considers the global environment based on consumer trends! Emphasizing planning, development, and proposal capabilities!

Yamato Material Co., Ltd. is a specialized trading company primarily engaged in the fields of "containers and packaging," "production systems," and "electronics-related products." The New Materials Division conducts planning and sales from inspection and packaging to production equipment in the semiconductor and electronics fields. 【Business Overview】 ■ New Materials Division *For more details, please refer to the catalog or feel free to contact us.*

  • Wafer
  • Plasma Ashing Equipment

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Batch-type plasma ashing device, wafer asher device

50-piece batch plasma ashing system (asher) compatible with 6-inch and 8-inch wafers. There is also a wafer single-piece processing type available.

We offer high-performance devices at low prices. Ashing rate: over 300 Å, in-plane uniformity: ±20% or less, inter-batch uniformity: ±20% or less, processing capacity: 150 wafers/hour (calculated at RF0 minutes). We also provide low-cost batch-type ashers and etchers. We accept retrofitting of aging equipment as well.

  • Ashing device
  • Other semiconductor manufacturing equipment
  • Plasma Ashing Equipment

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